SPECIFICATIONS| Electrical requirements (ACV×φ×Hz) | 200×3×50
220×3×60 | | Power (KW)(50/60Hz) | 5.0/6.0 | | Cooling method Water flow rate (L/min)(20℃) | 5.5 | | Weight (Kg) | 131 | | Adsober replacement cycle | 24,000 hours |
*C30MVR run multiple cryopumps.
*Cooling water inlet/outlet Rc 3/8
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