Achieve a soft pumpdown and vacuum system isolation with MKS Two-Stage Valves. They integrate a small bypass valve into the isolation valve, simplifying setup and reducing costs. With the integrated slow pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage.

Soft pumpdown and isolation of vacuum systems

• Adjustable conductance for variable pumpdown speed

• Formed bellows for less particle trapping and longer cycle life

• Angle and Inline body styles

• Port diameters from 1-4 inches

• ISO-KF, ISO-Universal and CF flanges, and weld stubs

Two-Stage Valves are best suited for high vacuum applications, specifically semiconductor or optical processing where a cleaner environment is needed.